Low-loss Waveguide Fabrication in III-V/SOI Hybrid Integration using Plasma Activated Bonding

Publication Information

Title

Japanese:
English:	Low-loss Waveguide Fabrication in III-V/SOI Hybrid Integration using Plasma Activated Bonding

Author

Japanese:	鈴木純一, 林侑介, 久能雄輝, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	Junichi Suzuki, Yuusuke Hayashi, Yuki Kuno, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

No. TuP22

Published date

Aug. 3, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Nano Optelectronics Workshop 2015

Conference site

Japanese:
English:	Tokyo