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Title
Japanese:超臨界二酸化炭素を用いた次世代MEMS電鋳技術と微小材料試験 
English: 
Author
Japanese: 曽根正人, ツォ-フ マーク チャン, 名越貴志, 陳君怡.  
English: Masato Sone, Tso-Fu Mark Chang, Takashi Nagoshi, Chun-Yi Chen.  
Language Japanese 
Journal/Book name
Japanese:化学工業 
English: 
Volume, Number, Page Vol. 67    No. 1    pp. 6-14
Published date Jan. 15, 2016 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
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