Effects of residual hydrogen in sputtering atmosphere on structures and properties of amorphous In-Ga-Zn-O thin films

Publication Information

Title

Japanese:
English:	Effects of residual hydrogen in sputtering atmosphere on structures and properties of amorphous In-Ga-Zn-O thin films

Author

Japanese:	Haochun Tang, 石川恭兵, 井手啓介, 平松秀典, Shigenori Ueda, 大橋直樹, 雲見日出也, 細野秀雄, 神谷利夫.
English:	Haochun Tang, Kyohei Ishikawa, Keisuke Ide, Hidenori Hiramatsu, Shigenori Ueda, Naoki Ohashi, Hideya Kumomi, Hideo Hosono, Toshio Kamiya.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

Vol. 118 pp. 205703-1-6

Published date

2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI