Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices

Publication Information

Title

Japanese:
English:	Pulse Electroplating of Ultra-Fine Grained Au Films with High Strength for Micro-Electrical-Mechanical System Devices

Author

Japanese:	陳君怡, 葭葉将治, TSO-FU MARK CHANG, 山根大輔, 町田克之, 益一哉, 曽根正人.
English:	Chun-Yi Chen, Masaharu Yoshiba, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	ISE - Topical Meeting

Volume, Number, Page

Published date

Apr. 17, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ISE - Topical Meeting

Conference site

Japanese:
English:	Auckland