Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices

Publication Information

Title

Japanese:
English:	Application of Supercritical Carbon Dioxide in Electroplating of Gold Materials Used in MEMS Devices

Author

Japanese:	Tang Hao-Chun, 陳君怡, TSO-FU MARK CHANG, 町田克之, 山根大輔, 益一哉, 曽根正人.
English:	Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Daisuke Yamane, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:	第63回応用物理学会春季学術講演会
English:

Volume, Number, Page

Published date

Mar. 19, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第63回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京
English: