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Publication Information
Title
Japanese:
English:
Silicon Dioxide Thin Film Prepared by Photochemical Vapor Deposition from Silicon Tetraacetate
Author
Japanese:
Maruyama, T.,
多湖 輝興
.
English:
Maruyama, T.,
Tago, T.
.
Language
English
Journal/Book name
Japanese:
English:
Thin Solid Films
Volume, Number, Page
Vol. 232 pp. 201-203
Published date
Jan. 1, 1993
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.