Silicon Dioxide Thin Film Prepared by Photochemical Vapor Deposition from Silicon Tetraacetate | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Silicon Dioxide Thin Film Prepared by Photochemical Vapor Deposition from Silicon Tetraacetate

Author

Japanese:	Maruyama, T., 多湖輝興.
English:	Maruyama, T., Tago, T..

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 232 pp. 201-203

Published date

Jan. 1, 1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

©2007 Tokyo Institute of Technology All rights reserved.