Germanium- and Silicon-Doped Indium-Oxide Thin Film Prepared by Radio-Frequency Magnetron Sputtering

Publication Information

Title

Japanese:	Germanium- and Silicon-Doped Indium-Oxide Thin Film Prepared by Radio-Frequency Magnetron Sputtering
English:

Author

Japanese:	丸山敏郎, 多湖輝興.
English:	Maruyama, T., Tago, T..

Language

Japanese

Journal/Book name

Japanese:
English:	Applied Physics Letters

Volume, Number, Page

Vol. 66 No. 11 pp. 1395-1397

Published date

Nov. 1, 1994

Publisher

Japanese:
English:	American Institute of Physics

Conference name

Japanese:
English:

Conference site

Japanese:
English: