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Publication Information
Title
Japanese:
English:
Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers
Author
Japanese:
寺西 美波
,
TSO-FU MARK CHANG
,
陳 君怡
,
小西 敏文
,
町田 克之
,
山根 大輔
,
益 一哉
,
曽根 正人
,
曽根 正人
.
English:
Minami Teranishi
,
Tso-Fu Mark Chang
,
Chun-Yi Chen
,
Toshifumi Konishi
,
Katsuyuki Machida
,
Hiroshi Toshiyoshi
,
Daisuke Yamane
,
Kazuya Masu
,
Masato Sone
.
Language
English
Journal/Book name
Japanese:
English:
Microelectronics Engineering
Volume, Number, Page
Vol. 153 pp. 90-93
Published date
Apr. 1, 2016
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1016/j.mee.2016.02.054
©2007
Tokyo Institute of Technology All rights reserved.