Laser Modification of Silicon and Borosilicate Glass Wettability for Micro-Fluidic Systems

Publication Information

Title

Japanese:
English:	Laser Modification of Silicon and Borosilicate Glass Wettability for Micro-Fluidic Systems

Author

Japanese:	青野祐子, 篠原亘, 戸倉和.
English:	Yuko Aono, Wataru Shinohara, Hitoshi Tokura.

Language

English

Journal/Book name

Japanese:
English:	International Journal of Automation Technology

Volume, Number, Page

Vol. 9 No. 6 pp. 668-673

Published date

2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI