Effect of Incubation Time on Preparation of Continuous and Flat Ru Films

Publication Information

Title

Japanese:
English:	Effect of Incubation Time on Preparation of Continuous and Flat Ru Films

Author

Japanese:	舟窪浩, 白石貴久, 及川貴弘, 平野雅輝, Hirokazu Chiba and, 河野和久.
English:	Hiroshi Funakubo, Takahisa Shiraishi, Takahiro Oikawa, Masaki Hirano, Hirokazu Chiba and, Kazuhisa Kawano.

Language

English

Journal/Book name

Japanese:
English:	J. Vac. Sci. Technol. A.

Volume, Number, Page

Vol. 33 No. 1 pp. 01A149-1-6

Published date

Jan. 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI