Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討

Publication Information

Title

Japanese:	Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討
English:

Author

Japanese:	山根大輔, 小西敏文, 伊藤浩之, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 21p-P17-18

Published date

Mar. 19, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第63回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京都
English: