Characterization of double cell system with halogen and LED illumination for fabrication of porous silicon substrates

Publication Information

Title

Japanese:
English:	Characterization of double cell system with halogen and LED illumination for fabrication of porous silicon substrates

Author

Japanese:	朴鍾淏, 栁田保子, 初澤毅.
English:	Jongho Park, Yasuko YANAGIDA, TAKESHI HATSUZAWA.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 14, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 16th International Conference on Precision Engineering

Conference site

Japanese:
English:	Hamamatsu