Atomic Step Patterning on Quartz Glass via Thermal Nanoimprinting

Publication Information

Title

Japanese:
English:	Atomic Step Patterning on Quartz Glass via Thermal Nanoimprinting

Author

Japanese:	Osamu Suga, 吉本護, Chieko Okuyama, 松田晃史, Hiroshi Hiroshima, Masaharu Takahashi.
English:	Osamu Suga, Mamoru Yoshimoto, Chieko Okuyama, Akifumi Matsuda, Hiroshi Hiroshima, Masaharu Takahashi.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Volume 54 Number 9 098001

Published date

Aug. 5, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI