Numerical simulation of plasma confinement in DC magnetron sputtering under different magnetic fields and anode structures

Publication Information

Title

Japanese:
English:	Numerical simulation of plasma confinement in DC magnetron sputtering under different magnetic fields and anode structures

Author

Japanese:	Junichi Kageyama, 吉本護, 松田晃史, Yasuhiko Akao, Eiji Shidoji.
English:	Junichi Kageyama, Mamoru Yoshimoto, Akifumi Matsuda, Yasuhiko Akao, Eiji Shidoji.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 13 pp. 088001(1)–(3)

Published date

July 14, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI