A 1-mG MEMS Sensor | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	A 1-mG MEMS Sensor

Author

Japanese:	山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 29, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	229th ECS Meeting

Conference site

Japanese:
English:	San Diego, CA

Official URL

http://www.electrochem.org/229

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