Developement of a suspention type sliding planar motion table using magnetic fluid lubrication

Publication Information

Title

Japanese:
English:	Developement of a suspention type sliding planar motion table using magnetic fluid lubrication

Author

Japanese:	Xinghui Li, 進士忠彦, 土方亘, 森本貴景.
English:	Xinghui Li, Tadahiko Shinshi, Wataru Hijikata, Yoshihiro Morimoto.

Language

English

Journal/Book name

Japanese:
English:	Review of Scientific Instruments

Volume, Number, Page

Vol. 87 pp. 065003

Published date

May 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI