Heteroepitaxial Growth of Diamond on 3C-SiC/Si Substrates by Antenna-Edge Microwave Plasma CVD

Publication Information

Title

Japanese:
English:	Heteroepitaxial Growth of Diamond on 3C-SiC/Si Substrates by Antenna-Edge Microwave Plasma CVD

Author

Japanese:	須藤建瑠, 矢板潤也, 岩崎孝之, M.Natal, S.E.Saddow, 波多野睦子.
English:	T.Suto, J.Yaita, T.Iwasaki, M.Natal, S.E.Saddow, M.Hatano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 25, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM2015

Conference site

Japanese:
English:	Sapporo