Home >

news Help

Publication Information


Title
Japanese: 
English:MEMS whistle-type temperature-compensated displacement sensor using resonant frequency shift 
Author
Japanese: 石田 忠, Van Nguyen Quet, 望月 翔太, 香川 裕介, 高山 俊男, 小俣 透.  
English: Tadashi Ishida, Van Nguyen Quet, Shota Mochizuki, Yusuke Kagawa, Toshio Takayama, Toru Omata.  
Language English 
Journal/Book name
Japanese: 
English:Sensors and Actuators A: Physical 
Volume, Number, Page Vol. 222        pp. 24-30
Published date Feb. 1, 2015 
Publisher
Japanese: 
English:elsevier 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1016/j.sna.2014.11.007
Abstract Sound from a whistle can be modulated by adjusting the length of the whistle's resonant tube. Using this principle, a whistle-type displacement sensor has been previously proposed but has not been achieved because of technological constraints. Owing to the precise flow control techniques presently available as well as the high processing accuracy, advanced miniaturization, and high-density integration capabilities offered by MEMS technology, we have developed microelectromechanical systems (MEMS) whistle-type displacement sensors that use only acoustic signals to measure displacement. The MEMS whistle-type displacement sensor was 5.0 mm in length, 2.1 mm in width, and 1.4 mm in thickness. The sensor achieves precise displacement measurement with a possible error of a few μm. Furthermore, the range of the deviation caused by a temperature change of 10 °C was reduced by approximately 90% when an additional whistle-type sensor was used as a temperature compensator, for an input displacement of 200 μm.

©2007 Tokyo Institute of Technology All rights reserved.