MEMS-in-TEM for Characterization of Material at the Nanoscale

Publication Information

Title

Japanese:
English:	MEMS-in-TEM for Characterization of Material at the Nanoscale

Author

Japanese:	石田忠, 藤田博之.
English:	Tadashi Ishida, Hiroyuki Fujita.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 6, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	26th International Microprocesses and Nanotechnology Conference

Conference site

Japanese:
English:	Hokkaido