MEMS combined with TEM Setup for Nanotribology

Publication Information

Title

Japanese:
English:	MEMS combined with TEM Setup for Nanotribology

Author

Japanese:	佐藤隆昭, 石田忠, 鍋屋信介, Laurent Jalabert, 藤田博之.
English:	Takaaki Sato, Tadashi Ishida, Shinsuke Nabeya, Laurent Jalabert, Hiroyuki Fujita.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 23rd ASME Annual Conference on Information Storage and Process Systems

Conference site

Japanese:
English:	California