Toward a Lab-in-a-TEM by mounting advanced-MEMS in TEM holder

Publication Information

Title

Japanese:
English:	Toward a Lab-in-a-TEM by mounting advanced-MEMS in TEM holder

Author

Japanese:	Laurent Jalabert, 佐藤隆昭, 石田忠, Guillou Herve, 江川実, 鍋屋信介, 高山由貴, Volz Sebastian, 藤田博之.
English:	Laurent Jalabert, Takaaki Sato, Tadashi Ishida, Guillou Herve, Minoru Egawa, Shinsuke Nabeya, Yuki Takayama, Sebastian Volz, Hiroyuki Fujita.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 19, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	38th International conference on Micro and Nano Eengineering

Conference site

Japanese:
English:	Toulouse