A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology

Publication Information

Title

Japanese:
English:	A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 299-300

Published date

June 26, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016)

Conference site

Japanese:
English:	Kanazawa

Official URL