Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer

Publication Information

Title

Japanese:
English:	Controllable Mechanical Properties of Au Films by Pulse Electroplating for MEMS Accelerometer

Author

Japanese:	葭葉将治, 陳君怡, Chang Tso-Fu Mark, 名越貴志, 山根大輔, 町田克之, 益一哉, 曽根正人.
English:	Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	MNE2016, 42nd Micro& Nano Engineering

Volume, Number, Page

Published date

Sept. 19, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MNE2016, 42nd Micro& Nano Engineering

Conference site

Japanese:
English:	Vienna