Heteroepitaxial Growth of Diamond on 3C-SiC/Si by Antenna-edge Microwave Plasma CVD

Publication Information

Title

Japanese:
English:	Heteroepitaxial Growth of Diamond on 3C-SiC/Si by Antenna-edge Microwave Plasma CVD

Author

Japanese:	須藤建瑠, 矢板潤也, 岩崎孝之, 波多野睦子.
English:	T. Suto, J. Yaita, T. Iwasaki, M. Hatano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 5, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Diamond Quantum Sensing Workshop 2015

Conference site

Japanese:
English:	Takamatsu