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Title
Japanese:エッジモード圧電振動子によるプローブ顕微鏡用プローブセンサ 
English: 
Author
Japanese: 神田 岳文, 本多幸司, 鈴森 康一.  
English: Takefumi Kanda, 本多幸司, Koichi Suzumori.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 1P1-N01 (1)～(2)
Published date May 2007 
Publisher
Japanese: 
English: 
Conference name
Japanese:日本機械学会ロボティクス・メカトロニクス講演会2007 
English: 
Conference site
Japanese: 
English: 

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