Room-temperature solid-phase epitaxial growth of β-Ga2O3 thin films on NiO-buffered sapphire (0001) substrates by KrF excimer laser annealing

Publication Information

Title

Japanese:
English:	Room-temperature solid-phase epitaxial growth of β-Ga2O3 thin films on NiO-buffered sapphire (0001) substrates by KrF excimer laser annealing

Author

Japanese:	Daishi Shiojiri, Daiji Fukuda, Nobuo Tsuchimine, Koji Koyama, 金子智, 松田晃史, 吉本護.
English:	Daishi Shiojiri, Daiji Fukuda, Nobuo Tsuchimine, Koji Koyama, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 3, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 1st International Workshop on Gallium Oxide and Related Materials IWGO

Conference site

Japanese:
English:	Kyoto