Effects of thermal annealing on elimination of deep defects in amorphous In–Ga–Zn–O thin-film transistors

Publication Information

Title

Japanese:
English:	Effects of thermal annealing on elimination of deep defects in amorphous In–Ga–Zn–O thin-film transistors

Author

Japanese:	Haochun Tang, 井手啓介, 平松秀典, 上田茂典, 大橋直樹, 雲見日出也, 細野秀雄, 神谷利夫.
English:	Haochun Tang, Keisuke Ide, Hidenori Hiramatsu, Shigenori Ueda, Naoki Ohashi, Hideya Kumomi, Hideo Hosono, Toshio Kamiya.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 614 73-78

Published date

2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: