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Title
Japanese:対向ターゲットスパッタ法によるi-a-Siパッシベーション膜の解析 
English: 
Author
Japanese: 中田和吉, ファリス アキラ, 宮島 晋介.  
English: Kazuyoshi Nakada, Bin Mohd Zulkifly Faris Akira, Shinsuke Miyajima.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         15p-P13-11
Published date Sept. 13, 2016 
Publisher
Japanese: 
English: 
Conference name
Japanese:第77回 応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:新潟県新潟市 
English: 

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