Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
対向ターゲットスパッタ法によるi-a-Siパッシベーション膜の解析
English:
Author
Japanese:
中田和吉
,
ファリス アキラ
,
宮島 晋介
.
English:
Kazuyoshi Nakada
,
Bin Mohd Zulkifly Faris Akira
,
Shinsuke Miyajima
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
15p-P13-11
Published date
Sept. 13, 2016
Publisher
Japanese:
English:
Conference name
Japanese:
第77回 応用物理学会秋季学術講演会
English:
Conference site
Japanese:
新潟県新潟市
English:
©2007
Tokyo Institute of Technology All rights reserved.