Diamond Like Carbon Prepared on Silicon Substrate with Ti Buffer Layer

Publication Information

Title

Japanese:	チタンバッファーを用いたシリコン基板上に成長したダイアモンドライクカーボン
English:	Diamond Like Carbon Prepared on Silicon Substrate with Ti Buffer Layer

Author

Language

English

Journal/Book name

Japanese:	第75回応用物理学会秋季学術講演会講演予稿集
English:	The 75th JSAP Autumn Meeting, 2014 Extended Abstracts

Volume, Number, Page

Published date

Sept. 1, 2014

Publisher

Japanese:	公益社団法人応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第75回応用物理学会秋季学術講演会
English:	The 75th JSAP Autumn Meeting, 2014

Conference site

Japanese:	北海道札幌市
English:	Sapporo City

Official URL