表面処理用高速ジェット式パルスプラズマ源の開発

Publication Information

Title

Japanese:	表面処理用高速ジェット式パルスプラズマ源の開発
English:	Development of high-speed jet pulsed plasma source for surface treatment

Author

Japanese:	小笠原大介, 川野浩明, 掛川賢, 宮原秀一, 沖野晃俊.
English:	Daisuke Ogasawara, Hiroaki Kawano, Ken Kakegawa, hidekadzu miyahara, AKITOSHI OKINO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Page 79

Published date

Sept. 13, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第77回応用物理学会秋季学術講演会
English:	JSAP Autumn Meeting, 2016

Conference site

Japanese:	新潟
English: