Room-temperature laser annealing for solid-phase epitaxial crystallization of β-Ga2O3 thin films

Publication Information

Title

Japanese:
English:	Room-temperature laser annealing for solid-phase epitaxial crystallization of β-Ga₂O₃ thin films

Author

Japanese:	塩尻大士, 福田大二, 山内涼輔, 土嶺信男, 小山浩司, 金子智, 松田晃史, 吉本護.
English:	daishi shiojiri, Daiji Fukuda, Ryosuke Yamauchi, Nobuo Tsuchimine, Koji Koyama, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Express

Volume, Number, Page

Vol. 9 105502

Published date

Sept. 23, 2016

Publisher

Japanese:
English:	IOPscience

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI