ダイヤモンド状炭素系膜の耐薬品性能評価

Publication Information

Title

Japanese:	ダイヤモンド状炭素系膜の耐薬品性能評価
English:	Evaluation of chemical resistance on diamond-like carbon and related films

Author

Japanese:	赤坂大樹1, 鈴木常生, 中野雅之, 神田一浩, 大竹尚登.
English:	Hiroki Akasaka, Tsuneo Suzuki, Masayuki Nakano, Kazuhiro Kanda, Naoto Ohtake.

Language

Japanese

Journal/Book name

Japanese:	第77回応用物理学会秋季学術講演会要旨集 CDROM 14p-A23-1~9]
English:

Volume, Number, Page

Published date

Sept. 14, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第77回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	新潟
English: