Preparation of Ca–Si Films on (001) Al2O3 Substrates by an RF Magnetron Sputtering Method and Their Electrical Properties

Publication Information

Title

Japanese:
English:	Preparation of Ca–Si Films on (001) Al2O3 Substrates by an RF Magnetron Sputtering Method and Their Electrical Properties

Author

Japanese:	上原睦雄, 秋山賢輔, 清水荘雄, 松島正明, 内田寛, 木村好里, 舟窪浩.
English:	Mutsuo Uehara, Kensuke Akiyama, Takao Shimizu, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Journal of Electronic Materials

Volume, Number, Page

Vol. 45 No. 6 pp. 3121-3126

Published date

Mar. 2, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI