Effect of Stress on Ferroelectricity of (Hf0.5Zr0.5)O2 Thin Films

Publication Information

Title

Japanese:
English:	Effect of Stress on Ferroelectricity of (Hf0.5Zr0.5)O2 Thin Films

Author

Japanese:	舟窪浩, 白石貴久, 横内達彦, Takahiro Oikawa, 内田寛.
English:	Hiroshi Funakubo, Takahisa Shiraishi, Tatsuhiko Yokouchi, Takahiro Oikawa, Hiroshi Uchida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 29, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2015 MRS Fall Meeting & Exhbit

Conference site

Japanese:
English:	Boston, MA