CSD 由来HfO2-ZrO2 固溶体薄膜の結晶構造と誘電特性

Publication Information

Title

Japanese:	CSD 由来HfO2-ZrO2 固溶体薄膜の結晶構造と誘電特性
English:

Author

Japanese:	阿部千穂子, 塩川真里奈, 片山きりは, 白石貴久, 清水荘雄, 舟窪浩, 内田寛.
English:	阿部千穂子, 塩川真里奈, Kiriha Katayama, Takahisa Shiraishi, Takao Shimizu, HIROSHI FUNAKUBO, Hiroshi Uchida.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 20, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	第32回強誘電体応用会議（FMA 32）
English:

Conference site

Japanese:	京都市
English: