A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System

Publication Information

Title

Japanese:
English:	A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System

Author

Japanese:	小西敏文, 山根大輔, 伊藤浩之, 道正志郎, 石原昇, 年吉洋, 益一哉.
English:	Toshifumi Konishi, Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 673-674

Published date

Sept. 26, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)

Conference site

Japanese:
English:	Tsukuba

Official URL