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Title
Japanese: 
English:A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System 
Author
Japanese: 小西 敏文, 山根 大輔, 伊藤 浩之, 道正 志郎, 石原 昇, 年吉 洋, 益 一哉.  
English: Toshifumi Konishi, Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 673-674
Published date Sept. 26, 2016 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016) 
Conference site
Japanese: 
English:Tsukuba 
Official URL http://www.ssdm.jp/
 

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