A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology

Publication Information

Title

Japanese:
English:	A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 佐布晃昭, 年吉洋, 曽根正人, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 485-486

Published date

Sept. 26, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)

Conference site

Japanese:
English:	Tsukuba

Official URL