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Publication Information
Title
Japanese:
超音波振動攪拌機構を用いた水熱合成法によるPZT薄膜アクチュエータ
English:
Author
Japanese:
甲昌男,
神田 岳文
,
鈴森 康一
.
English:
甲昌男,
Takefumi Kanda
,
Koichi Suzumori
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
pp. 769-770
Published date
Sept. 2007
Publisher
Japanese:
English:
Conference name
Japanese:
2007年度精密工学会秋季大会学術講演会
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.