Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements

Publication Information

Title

Japanese:	Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements
English:	Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements

Author

Japanese:	Kitaoka, Y, Tono, T, Yoshimoto, S, 平原徹, Hasegawa, S, Ohba, T.
English:	Kitaoka, Y, Tono, T, Yoshimoto, S, Toru Hirahara, Hasegawa, S, Ohba, T.

Language

English

Journal/Book name

Japanese:	Applied Physics Letters
English:	Applied Physics Letters

Volume, Number, Page

Vol. 95 No. 5

Published date

2009

Publisher

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English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI