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Publication Information
Title
Japanese:
高密度プラズマを用いた3C-SiC/Si上のダイヤモンドヘテロエピタキシャル成長及び欠陥評価
English:
Author
Japanese:
矢板潤也
,
岩崎孝之
, Meralys Natal, S. E. Saddow,
波多野睦子
.
English:
Junya Yaita
,
Takayuki Iwasaki
, Meralys Natal, S. E. Saddow,
Mutsuko Hatano
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 14, 2016
Publisher
Japanese:
English:
Conference name
Japanese:
第77回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
新潟
English:
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Tokyo Institute of Technology All rights reserved.