Evaluation of Plasma Resistance of YOF Ceramics | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:	YOFセラミックスのプラズマ耐性評価
English:	Evaluation of Plasma Resistance of YOF Ceramics

Author

Japanese:	津之浦徹, 吉田克己, 矢野豊彦.
English:	Toru Tsunoura, Katsumi Yoshida, Toyohiko Yano.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

# 19p-W621-8

Published date

Mar. 19, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第63回応用物理学会春季学術講演会
English:	The 63rd JSAP Spring Meeting, 2016

Conference site

Japanese:	東京
English:	Tokyo

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