Micromachining and micro-magnetization of Pr-Fe-B magnets fabricated using pulsed laser deposition for MEMS applications

Publication Information

Title

Japanese:
English:	Micromachining and micro-magnetization of Pr-Fe-B magnets fabricated using pulsed laser deposition for MEMS applications

Author

Japanese:	藤原良元, 田中駿也, 土方亘, 進士忠彦, Keishi Hirotaki, Akihiro Yamashita, Masaki Nakano.
English:	Ryogen Fujiwara, Shunya Tanaka, Wataru Hijikata, Tadahiko Shinshi, Keishi Hirotaki, Akihiro Yamashita, Masaki Nakano.

Language

English

Journal/Book name

Japanese:
English:	Sensors and Actuators A:Physical

Volume, Number, Page

No. 251 pp. 219-224

Published date

Nov. 2016

Publisher

Japanese:
English:	ELSEVIER

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI