RC発振器型高感度容量検出回路

Publication Information

Title

Japanese:	RC発振器型高感度容量検出回路
English:	A high-resolution capacitive sensor circuit using RC oscillator

Author

Japanese:	高安基大, 道正志郎, 伊藤浩之, 石原昇, 山根大輔, 小西敏文, 町田克之, 益一哉.
English:	Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Noboru Ishihara, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 24, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第8回集積化MEMSシンポジウム
English:

Conference site

Japanese:	長崎県
English: