Manufacturability-aware Mask Assignment in Multiple Patterning Lithography

Publication Information

Title

Japanese:
English:	Manufacturability-aware Mask Assignment in Multiple Patterning Lithography

Author

Japanese:	小平行秀, 高橋篤司, 松井知己, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka.
English:	Yukihide Kohira, Atsushi Takahashi, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka.

Language

English

Journal/Book name

Japanese:
English:	Proc. the 2016 IEEE Asia-Pacific Conference on Circuits and Systems (APCCAS 2016)

Volume, Number, Page

pp. 538-541

Published date

Oct. 28, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Jeju Island

Official URL

DOI