Release Agent Free Ultraviolet Nanoimprint Lithography by Cyclic Olefin Polymer and Polydimethylsiloxane Made Mold

Publication Information

Title

Japanese:
English:	Release Agent Free Ultraviolet Nanoimprint Lithography by Cyclic Olefin Polymer and Polydimethylsiloxane Made Mold

Author

Japanese:	橋本優生, 茂木克雄, 山本貴富喜.
English:	Yuki Hashimoto, Mogi Katsuo, Takatoki Yamamoto.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 167-169

Published date

June 26, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT 2016)

Conference site

Japanese:
English:	Kanazawa