Vacuum ultraviolet light assisted nano-pattern transfer to fabricate nanostructure with heterogeneous materials

Publication Information

Title

Japanese:
English:	Vacuum ultraviolet light assisted nano-pattern transfer to fabricate nanostructure with heterogeneous materials

Author

Japanese:	橋本優生, 茂木克雄, 山本貴富喜.
English:	Yuki Hashimoto, Katsuo Mogi, Takatoki Yamamoto.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 19, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	42nd Micro and Nano Engineering (MNE 2016)

Conference site

Japanese:
English:	Vienna