Fabrication of pneumatic microvalve for tall microchannel using inclined lithography | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Fabrication of pneumatic microvalve for tall microchannel using inclined lithography

Author

Japanese:	神永真帆, 石田忠, 小俣透.
English:	Maho Kaminaga, Tadashi Ishida, Toru Omata.

Language

English

Journal/Book name

Japanese:
English:	micromachines

Volume, Number, Page

Vol. 7

Published date

Dec. 9, 2016

Publisher

Japanese:
English:	MDPI

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

https://doi.org/10.3390/mi7120224

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