Buffer-Layer Enhanced Heteroepitaxy of β-Ga<sub>2</sub>O<sub>3</sub>:(Sn, Si) Thin Films by Room-Temperature Excimer Laser Annealing

Publication Information

Title

Japanese:
English:	Buffer-Layer Enhanced Heteroepitaxy of β-Ga₂O₃:(Sn, Si) Thin Films by Room-Temperature Excimer Laser Annealing

Author

Japanese:	松田晃史, 塩尻大士, 内田啓貴, 中村稀星, Yanna Chen, 坂田修身, 土嶺信男, 金子智, 吉本護.
English:	Akifumi Matsuda, Daishi Shiojiri, Hiroki Uchida, Kisho Nakamura, Yanna Chen, Osami Sakata, Nobuo Tsuchimine, Satoru Kaneko, Mamoru Yoshimoto.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 27, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2016 MRS Fall Meeting & Exhibit

Conference site

Japanese:	ボストン
English:	Boston

Official URL