ZnO thin-film transistor grown by rf sputtering using Zn metal target and oxidizer pulsing

Publication Information

Title

Japanese:
English:	ZnO thin-film transistor grown by rf sputtering using Zn metal target and oxidizer pulsing

Author

Japanese:	Dukyean Yoo, Wonjin Jeon, 金正煥, Youjung Yang, Jungyol Jo.
English:	Dukyean Yoo, Wonjin Jeon, Junghwan Kim, Youjung Yang, Jungyol Jo.

Language

English

Journal/Book name

Japanese:
English:	Journal of Ceramic Society of Japan

Volume, Number, Page

vol. 125 no. 3 pp. 112-117

Published date

Mar. 1, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI