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Publication Information
Title
Japanese:
積層メタル技術で作製したMEMS慣性センサのモジュール化の検討
English:
A study of module using MEMS accelerometer by multi-layer metal technology
Author
Japanese:
高安 基大
,
權田 惇晟
,
山根 大輔
,
伊藤 浩之
,
小西 敏文
,
道正 志郎
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Motohiro Takayasu
,
Toshiaki Gonda
,
Daisuke Yamane
,
Hiroyuki Ito
,
Toshifumi Konishi
,
Shiro Dosho
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 14, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
第64回 応用物理学会 春季学術講演会
English:
The 64th JSAP Spring Meeting, 2017
Conference site
Japanese:
神奈川県
English:
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Tokyo Institute of Technology All rights reserved.